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| LEADER |
00000cam a2200000 c 4500 |
| 001 |
1090602014 |
| 003 |
DE-627 |
| 005 |
20250226120937.0 |
| 007 |
tu |
| 008 |
900531s1989 xx ||||| m 00| ||ger c |
| 035 |
|
|
|a (DE-627)1090602014
|
| 035 |
|
|
|a (DE-576)020602014
|
| 035 |
|
|
|a (DE-599)BSZ020602014
|
| 035 |
|
|
|a (OCoLC)1501864039
|
| 035 |
|
|
|a (OCoLC)46129097
|
| 035 |
|
|
|a (DE-604)8040720306
|
| 040 |
|
|
|a DE-627
|b ger
|c DE-627
|e rakwb
|
| 041 |
|
|
|a ger
|
| 084 |
|
|
|a 29
|2 sdnb
|
| 100 |
1 |
|
|a Ehrensperger, Wilfried
|0 (DE-588)1357729537
|0 (DE-627)1918612064
|4 aut
|
| 245 |
1 |
0 |
|a Mikrolithographie auf rotierendem Substrat im tiefen Ultra-Violett
|c vorgelegt von Wilfried Ehrensperger
|
| 264 |
|
1 |
|c 1989
|
| 300 |
|
|
|a 105 Bl.
|b Ill., graph. Darst.
|
| 336 |
|
|
|a Text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
|
| 338 |
|
|
|a Band
|b nc
|2 rdacarrier
|
| 502 |
|
|
|a Heidelberg, Univ., Diss., 1990
|
| 583 |
1 |
|
|a Archivierung prüfen
|c 20200919
|f DE-640
|z 3
|2 pdager
|
| 655 |
|
7 |
|a Hochschulschrift
|0 (DE-588)4113937-9
|0 (DE-627)105825778
|0 (DE-576)209480580
|2 gnd-content
|
| 689 |
0 |
0 |
|d s
|0 (DE-588)4191584-7
|0 (DE-627)104464844
|0 (DE-576)210074493
|a Lithografie
|g Halbleitertechnologie
|2 gnd
|
| 689 |
0 |
1 |
|d s
|0 (DE-588)4186733-6
|0 (DE-627)105277339
|0 (DE-576)210041102
|a Ultraviolett
|2 gnd
|
| 689 |
0 |
|
|5 (DE-627)
|
| 951 |
|
|
|a BO
|
| 990 |
|
|
|a Ultraviolett
|
| 990 |
|
|
|a Lithografie
|
| 992 |
|
|
|a 20250226
|
| 993 |
|
|
|a Thesis
|
| 994 |
|
|
|a 1989
|
| 998 |
|
|
|g 1357729537
|a Ehrensperger, Wilfried
|m 1357729537:Ehrensperger, Wilfried
|d 130000
|d 130001
|e 130000PE1357729537
|e 130001PE1357729537
|k 0/130000/
|k 1/130000/130001/
|p 1
|x j
|y j
|
| 999 |
|
|
|a KXP-PPN1090602014
|e 4673292065
|
| BIB |
|
|
|a Y
|
| JSO |
|
|
|a {"recId":"1090602014","language":["ger"],"type":{"bibl":"thesis"},"physDesc":[{"noteIll":"Ill., graph. Darst.","extent":"105 Bl."}],"person":[{"display":"Ehrensperger, Wilfried","role":"aut","family":"Ehrensperger","given":"Wilfried"}],"name":{"displayForm":["vorgelegt von Wilfried Ehrensperger"]},"noteThesis":["Heidelberg, Univ., Diss., 1990"],"id":{"eki":["1090602014"]},"title":[{"title":"Mikrolithographie auf rotierendem Substrat im tiefen Ultra-Violett","title_sort":"Mikrolithographie auf rotierendem Substrat im tiefen Ultra-Violett"}],"origin":[{"dateIssuedKey":"1989","dateIssuedDisp":"1989"}]}
|
| SRT |
|
|
|a EHRENSPERGMIKROLITHO1989
|
