Microparticle transfer onto pixel electrodes of 45µm pitch on HV-CMOS chips
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Article (Journal) |
| Language: | English |
| Published: |
2011
|
| In: |
Sensors and actuators. A, Physical
Year: 2011, Volume: 172, Issue: 2, Pages: 533-545 |
| ISSN: | 1873-3069 |
| DOI: | 10.1016/j.sna.2011.06.017 |
| Online Access: | Resolving-System, Volltext: http://dx.doi.org/10.1016/j.sna.2011.06.017
|
| Author Notes: | simulation and experiment |
MARC
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