APA-Zitierstil (7. Ausg.)

Kleditzsch, S., & Riedel, U. (2001). Sensitivity studies for volume averaged models of plasma etch reactors. Surface and coatings technology, 142(Supplement C), . https://doi.org/10.1016/S0257-8972(01)01068-4

Chicago-Zitierstil (17. Ausg.)

Kleditzsch, Stefan, und Uwe Riedel. "Sensitivity Studies for Volume Averaged Models of Plasma Etch Reactors." Surface and Coatings Technology 142, no. Supplement C (2001). https://doi.org/10.1016/S0257-8972(01)01068-4.

MLA-Zitierstil (9. Ausg.)

Kleditzsch, Stefan, und Uwe Riedel. "Sensitivity Studies for Volume Averaged Models of Plasma Etch Reactors." Surface and Coatings Technology, vol. 142, no. Supplement C, 2001, https://doi.org/10.1016/S0257-8972(01)01068-4.