APA (7th ed.) Citation

Franke, S., Beck, S., & Pucci, A. (2017). Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 35, . https://doi.org/10.1116/1.4971173

Chicago Style (17th ed.) Citation

Franke, Sebastian, Sebastian Beck, and Annemarie Pucci. "Alumina Films as Gas Barrier Layers Grown by Spatial Atomic Layer Deposition with Trimethylaluminum and Different Oxygen Sources." Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films 35 (2017). https://doi.org/10.1116/1.4971173.

MLA (9th ed.) Citation

Franke, Sebastian, et al. "Alumina Films as Gas Barrier Layers Grown by Spatial Atomic Layer Deposition with Trimethylaluminum and Different Oxygen Sources." Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, vol. 35, 2017, https://doi.org/10.1116/1.4971173.