Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
Gespeichert in:
| Hauptverfasser: | , , |
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| Dokumenttyp: | Article (Journal) |
| Sprache: | Englisch |
| Veröffentlicht: |
2017
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| In: |
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Year: 2016, Jahrgang: 35 |
| ISSN: | 1520-8559 |
| DOI: | 10.1116/1.4971173 |
| Online-Zugang: | Verlag, Volltext: http://dx.doi.org/10.1116/1.4971173 Verlag, Volltext: https://avs.scitation.org/doi/10.1116/1.4971173 
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| Verfasserangaben: | Sebastian Franke, Matthias Baumkötter, Carsten Monka, Sebastian Raabe, Reinhard Caspary, Hans-Hermann Johannes, Wolfgang Kowalsky, Sebastian Beck, Annemarie Pucci, Hassan Gargouri |
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