High-precision combinatorial deposition of micro particle patterns on a microelectronic chip

Saved in:
Bibliographic Details
Other Authors: Löffler, Felix (Other) , Wagner, Jennifer (Other) , Hausmann, Michael (Other)
Format: Article (Journal)
Language:English
Published: 2011
In: Aerosol science and technology
Year: 2011, Volume: 45, Pages: 65-74
ISSN:0278-6826
Online Access: Get full text
Author Notes:Löffler, F., Wagner, J. ... Hausmann, M. ...

MARC

LEADER 00000caa a22000002c 4500
001 1629180149
003 DE-627
005 20220920134828.0
007 tu
008 120301s2011 xx ||||| 00| ||eng c
035 |a (DE-627)1629180149 
035 |a (DE-576)360041957 
035 |a (DE-599)BSZ360041957 
035 |a (OCoLC)1341047104 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
084 |a 29  |2 sdnb 
245 0 0 |a High-precision combinatorial deposition of micro particle patterns on a microelectronic chip  |c Löffler, F., Wagner, J. ... Hausmann, M. ... 
264 1 |c 2011 
300 |a 10 
336 |a Text  |b txt  |2 rdacontent 
337 |a ohne Hilfsmittel zu benutzen  |b n  |2 rdamedia 
338 |a Band  |b nc  |2 rdacarrier 
700 1 |a Löffler, Felix  |0 (DE-588)1025562968  |0 (DE-627)722933096  |0 (DE-576)370509196  |4 oth 
700 1 |a Wagner, Jennifer  |d 1984-  |0 (DE-588)1017549591  |0 (DE-627)690369484  |0 (DE-576)353932426  |4 oth 
700 1 |a Hausmann, Michael  |d 1966-  |0 (DE-588)120185733  |0 (DE-627)696450747  |0 (DE-576)292085257  |4 oth 
773 0 8 |i In  |t Aerosol science and technology  |d Philadelphia, Pa. : Taylor & Francis, 1982  |g 45(2011), Seite 65-74  |w (DE-627)130565857  |w (DE-600)787246-X  |w (DE-576)016111559  |x 0278-6826  |7 nnas  |a High-precision combinatorial deposition of micro particle patterns on a microelectronic chip 
773 1 8 |g volume:45  |g year:2011  |g pages:65-74  |g extent:10  |a High-precision combinatorial deposition of micro particle patterns on a microelectronic chip 
776 0 8 |i Erscheint auch als  |n Online-Ausgabe  |a Löffler, Felix  |t High-Precision combinatorial deposition of micro particle patterns on a microelectronic chip  |d 2011  |w (DE-627)1817007033 
951 |a AR 
992 |a 20120301 
993 |a Article 
998 |g 120185733  |a Hausmann, Michael  |m 120185733:Hausmann, Michael  |d 130000  |d 130700  |e 130000PH120185733  |e 130700PH120185733  |k 0/130000/  |k 1/130000/130700/  |p 8 
998 |g 1017549591  |a Wagner, Jennifer  |m 1017549591:Wagner, Jennifer  |d 130000  |e 130000PW1017549591  |k 0/130000/  |p 2 
999 |a KXP-PPN1629180149  |e 3276553724 
BIB |a Y 
SER |a journal 
JSO |a {"id":{"eki":["1629180149"]},"title":[{"title_sort":"High-precision combinatorial deposition of micro particle patterns on a microelectronic chip","title":"High-precision combinatorial deposition of micro particle patterns on a microelectronic chip"}],"origin":[{"dateIssuedDisp":"2011","dateIssuedKey":"2011"}],"person":[{"given":"Felix","family":"Löffler","role":"oth","display":"Löffler, Felix"},{"given":"Jennifer","family":"Wagner","role":"oth","display":"Wagner, Jennifer"},{"role":"oth","display":"Hausmann, Michael","given":"Michael","family":"Hausmann"}],"name":{"displayForm":["Löffler, F., Wagner, J. ... Hausmann, M. ..."]},"recId":"1629180149","relHost":[{"name":{"displayForm":["American Association for Aerosol Research"]},"id":{"zdb":["787246-X"],"eki":["130565857"],"issn":["0278-6826"]},"origin":[{"publisherPlace":"Philadelphia, Pa. ; New York, NY","dateIssuedDisp":"1982-","publisher":"Taylor & Francis ; Elsevier","dateIssuedKey":"1982"}],"title":[{"title":"Aerosol science and technology","title_sort":"Aerosol science and technology"}],"recId":"130565857","language":["eng"],"corporate":[{"display":"American Association for Aerosol Research","roleDisplay":"Herausgebendes Organ","role":"isb"}],"type":{"bibl":"periodical"},"disp":"High-precision combinatorial deposition of micro particle patterns on a microelectronic chipAerosol science and technology","part":{"pages":"65-74","year":"2011","extent":"10","volume":"45","text":"45(2011), Seite 65-74"},"pubHistory":["1.1982 -"]}],"language":["eng"],"type":{"bibl":"article-journal"},"physDesc":[{"extent":"10 S."}]} 
SRT |a HIGHPRECIS2011