High-precision combinatorial deposition of micro particle patterns on a microelectronic chip
Saved in:
| Other Authors: | , , |
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| Format: | Article (Journal) |
| Language: | English |
| Published: |
2011
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| In: |
Aerosol science and technology
Year: 2011, Volume: 45, Pages: 65-74 |
| ISSN: | 0278-6826 |
| Online Access: |
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| Author Notes: | Löffler, F., Wagner, J. ... Hausmann, M. ... |
MARC
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