High-Precision combinatorial deposition of micro particle patterns on a microelectronic chip - Löffler, Felix; Wagner, Jennifer; König, Kai; Märkle, Frieder; Fernández, Simón; Schirwitz, Christopher; Torralba, Gloria; Hausmann, Michael; Lindenstruth, V.; Bischoff, F. Ralf; Breitling, F.; Nesterov, A. (Aerosol science and technology, 2011)
Gesehen am 20.09.2022