Behrendt, F., Deutschmann, O., Ruf, B., & Warnatz, J. (1996). Numerical study of apparent activation energies of diamond growth rates in hot filament chemical vapor deposition systems. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 14(3), . https://doi.org/10.1116/1.580304
Chicago-Zitierstil (17. Ausg.)Behrendt, Frank, Olaf Deutschmann, Bernhard Ruf, und Jürgen Warnatz. "Numerical Study of Apparent Activation Energies of Diamond Growth Rates in Hot Filament Chemical Vapor Deposition Systems." Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films 14, no. 3 (1996). https://doi.org/10.1116/1.580304.
MLA-Zitierstil (9. Ausg.)Behrendt, Frank, et al. "Numerical Study of Apparent Activation Energies of Diamond Growth Rates in Hot Filament Chemical Vapor Deposition Systems." Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, vol. 14, no. 3, 1996, https://doi.org/10.1116/1.580304.