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Numerical study of apparent activation energies of diamond growth rates in hot filament chemical vapor deposition systems

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Bibliographische Detailangaben
Hauptverfasser: Behrendt, Frank (VerfasserIn) , Deutschmann, Olaf (VerfasserIn) , Ruf, Bernhard (VerfasserIn) , Warnatz, Jürgen (VerfasserIn)
Dokumenttyp: Article (Journal)
Sprache:Englisch
Veröffentlicht: 1996
In: Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Year: 1996, Jahrgang: 14, Heft: 3, Pages: 1604-1608
ISSN:1520-8559
DOI:10.1116/1.580304
Online-Zugang:Verlag, lizenzpflichtig, Volltext: https://doi.org/10.1116/1.580304
Verlag, lizenzpflichtig, Volltext: https://avs.scitation.org/doi/10.1116/1.580304
Volltext
Verfasserangaben:Frank Behrendt, Olaf Deutschmann, Bernhard Ruf, Jürgen Warnatz

MARC

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