Scalable Non-Volatile Tuning of Photonic Computational Memories by Automated Silicon Ion Implantation

Photonic integrated circuits (PICs) are revolutionizing the realm of information technology, promising unprecedented speeds and efficiency in data processing and optical communication. However, the nanoscale precision required to fabricate these circuits at scale presents significant challenges, due...

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Hauptverfasser: Varri, Akhil (VerfasserIn) , Taheriniya, Shabnam (VerfasserIn) , Brückerhoff-Plückelmann, Frank (VerfasserIn) , Bente, Ivonne (VerfasserIn) , Farmakidis, Nikolaos (VerfasserIn) , Bernhardt, Daniel (VerfasserIn) , Rösner, Harald (VerfasserIn) , Kruth, Maximilian (VerfasserIn) , Nadzeyka, Achim (VerfasserIn) , Richter, Torsten (VerfasserIn) , Wright, Christopher David (VerfasserIn) , Bhaskaran, Harish (VerfasserIn) , Wilde, Gerhard (VerfasserIn) , Pernice, Wolfram (VerfasserIn)
Dokumenttyp: Article (Journal)
Sprache:Englisch
Veröffentlicht: 24 November 2023
Ausgabe:Online version of record before inclusion in an issue
In: Advanced materials
Year: 2023, Pages: 1-11
ISSN:1521-4095
DOI:10.1002/adma.202310596
Online-Zugang:Verlag, kostenfrei, Volltext: https://doi.org/10.1002/adma.202310596
Verlag, kostenfrei, Volltext: https://onlinelibrary.wiley.com/doi/abs/10.1002/adma.202310596
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Verfasserangaben:Akhil Varri, Shabnam Taheriniya, Frank Brückerhoff-Plückelmann, Ivonne Bente, Nikolaos Farmakidis, Daniel Bernhardt, Harald Rösner, Maximilian Kruth, Achim Nadzeyka, Torsten Richter, Christopher David Wright, Harish Bhaskaran, Gerhard Wilde, and Wolfram H. P. Pernice

MARC

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