Nanofabrication for nanophotonics
Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in...
Gespeichert in:
| Hauptverfasser: | , , |
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| Dokumenttyp: | Article (Journal) |
| Sprache: | Englisch |
| Veröffentlicht: |
March 28, 2025
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| In: |
ACS nano
Year: 2025, Jahrgang: 19, Heft: 13, Pages: 12491-12605 |
| ISSN: | 1936-086X |
| DOI: | 10.1021/acsnano.4c10964 |
| Online-Zugang: | Verlag, lizenzpflichtig, Volltext: https://doi.org/10.1021/acsnano.4c10964
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| Verfasserangaben: | Younghwan Yang, Hyunah Kwon, Peer Fischer [und viele weitere] |
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| LEADER | 00000naa a2200000 c 4500 | ||
|---|---|---|---|
| 001 | 1938356314 | ||
| 003 | DE-627 | ||
| 005 | 20251014120151.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 251014s2025 xx |||||o 00| ||eng c | ||
| 024 | 7 | |a 10.1021/acsnano.4c10964 |2 doi | |
| 035 | |a (DE-627)1938356314 | ||
| 035 | |a (DE-599)KXP1938356314 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rda | ||
| 041 | |a eng | ||
| 084 | |a 29 |2 sdnb | ||
| 100 | 1 | |a Yang, Younghwan |e VerfasserIn |0 (DE-588)1378927788 |0 (DE-627)1938358333 |4 aut | |
| 245 | 1 | 0 | |a Nanofabrication for nanophotonics |c Younghwan Yang, Hyunah Kwon, Peer Fischer [und viele weitere] |
| 264 | 1 | |c March 28, 2025 | |
| 300 | |b Illustrationen | ||
| 300 | |a 115 | ||
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 500 | |a Gesehen am 14.10.2025 | ||
| 520 | |a Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field. | ||
| 700 | 1 | |a Kwon, Hyunah |d 1989- |e VerfasserIn |0 (DE-588)1304871096 |0 (DE-627)1860655750 |4 aut | |
| 700 | 1 | |a Fischer, Peer |d 1972- |e VerfasserIn |0 (DE-588)1037836367 |0 (DE-627)756337402 |0 (DE-576)391876503 |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |a American Chemical Society |t ACS nano |d Washington, DC : Soc., 2007 |g 19(2025), 13, Seite 12491-12605 |h Online-Ressource |w (DE-627)539881392 |w (DE-600)2383064-5 |w (DE-576)276561139 |x 1936-086X |7 nnas |
| 773 | 1 | 8 | |g volume:19 |g year:2025 |g number:13 |g pages:12491-12605 |g extent:115 |a Nanofabrication for nanophotonics |
| 856 | 4 | 0 | |u https://doi.org/10.1021/acsnano.4c10964 |x Verlag |x Resolving-System |z lizenzpflichtig |3 Volltext |
| 951 | |a AR | ||
| 992 | |a 20251014 | ||
| 993 | |a Article | ||
| 994 | |a 2025 | ||
| 998 | |g 1037836367 |a Fischer, Peer |m 1037836367:Fischer, Peer |d 160000 |d 160200 |e 160000PF1037836367 |e 160200PF1037836367 |k 0/160000/ |k 1/160000/160200/ |p 44 | ||
| 998 | |g 1304871096 |a Kwon, Hyunah |m 1304871096:Kwon, Hyunah |d 160000 |d 160200 |e 160000PK1304871096 |e 160200PK1304871096 |k 0/160000/ |k 1/160000/160200/ |p 42 | ||
| 999 | |a KXP-PPN1938356314 |e 4786927252 | ||
| BIB | |a Y | ||
| SER | |a journal | ||
| JSO | |a {"person":[{"display":"Yang, Younghwan","role":"aut","family":"Yang","given":"Younghwan"},{"display":"Kwon, Hyunah","role":"aut","family":"Kwon","given":"Hyunah"},{"given":"Peer","family":"Fischer","role":"aut","display":"Fischer, Peer"}],"language":["eng"],"title":[{"title":"Nanofabrication for nanophotonics","title_sort":"Nanofabrication for nanophotonics"}],"relHost":[{"pubHistory":["1.2007,Aug. -"],"title":[{"title_sort":"ACS nano","title":"ACS nano"}],"part":{"volume":"19","year":"2025","extent":"115","pages":"12491-12605","issue":"13","text":"19(2025), 13, Seite 12491-12605"},"physDesc":[{"extent":"Online-Ressource"}],"type":{"media":"Online-Ressource","bibl":"periodical"},"id":{"eki":["539881392"],"issn":["1936-086X"],"zdb":["2383064-5"]},"language":["eng"],"corporate":[{"display":"American Chemical Society","role":"aut"}],"origin":[{"dateIssuedKey":"2007","publisherPlace":"Washington, DC","dateIssuedDisp":"2007-","publisher":"Soc."}],"disp":"American Chemical SocietyACS nano","recId":"539881392","name":{"displayForm":["American Chemical Society"]},"titleAlt":[{"title":"Nano"}]}],"physDesc":[{"noteIll":"Illustrationen","extent":"115 S."}],"type":{"media":"Online-Ressource","bibl":"article-journal"},"id":{"eki":["1938356314"],"doi":["10.1021/acsnano.4c10964"]},"note":["Gesehen am 14.10.2025"],"name":{"displayForm":["Younghwan Yang, Hyunah Kwon, Peer Fischer [und viele weitere]"]},"recId":"1938356314","origin":[{"dateIssuedDisp":"March 28, 2025","dateIssuedKey":"2025"}]} | ||
| SRT | |a YANGYOUNGHNANOFABRIC2820 | ||