New spatial resolved inline metrology on multicrystalline silicon for PV - Dornich, Kay; Schüler, Nadine; Mittelstraß, Dirk; Krause, A.; Gründig-Wendrock, Bianca; Niemietz, Kathrin; Niklas, Jürgen (The compiled state-of-the-art of PV solar technology and deployment, 2009)