Journal of vacuum science & technology: JVST ; the official journal of the American Vacuum Society / A Vacuum, surfaces, and films
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| Format: | Edited Volume Journal |
|---|---|
| Language: | English |
| Published: |
New York, NY
Inst.
1983-
|
| Volumes / Articles: | Show Volumes / Articles. |
| ISSN: | 1520-8559 0734-2101 |
| Subjects: | |
| Online Access: | Frontdoor-Url: https://ezb.ur.de/?1475424-1 Verlag: https://pubs.aip.org/avs/jva 
|
| Author Notes: | publ. by the American Institute of Physics |
MARC
| LEADER | 00000cas a2200000 c 4500 | ||
|---|---|---|---|
| 001 | 269538232 | ||
| 003 | DE-627 | ||
| 005 | 20251005124909.0 | ||
| 007 | cr ||||||||||| | ||
| 008 | 990527c19839999xxuz| p|o 0 |0eng c | ||
| 016 | 7 | |a 019684665 |2 DE-101 | |
| 016 | 7 | |a 1475424-1 |2 DE-600 | |
| 022 | |a 1520-8559 | ||
| 030 | |a JVTAD | ||
| 035 | |a (DE-627)269538232 | ||
| 035 | |a (DE-576)077885457 | ||
| 035 | |a (DE-599)ZDB1475424-1 | ||
| 035 | |a (OCoLC)973877781 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 044 | |c XD-US | ||
| 082 | 0 | 4 | |a 530 |q DE-600 |
| 084 | |a 29 |2 sdnb | ||
| 084 | |a UA 1000 |q SEPA |2 rvk |0 (DE-625)rvk/145215: | ||
| 084 | |a 33.09 |2 bkl | ||
| 084 | |a 52.78 |2 bkl | ||
| 245 | 0 | 0 | |a Journal of vacuum science & technology |b JVST ; the official journal of the American Vacuum Society |n A |p Vacuum, surfaces, and films |c publ. by the American Institute of Physics |
| 246 | 1 | |i Abweichender Titel |a Journal of vacuum science & technology / A | |
| 246 | 3 | 3 | |a JVST |
| 246 | 3 | 3 | |a Journal of vacuum science and technology |
| 264 | 3 | 1 | |a New York, NY |b Inst. |c 1983- |
| 300 | |a Online-Ressource | ||
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 362 | 0 | |a 1.1983 - | |
| 363 | 0 | 1 | |a 1 |i 1983 |
| 500 | |a Gesehen am 19.06.2023 | ||
| 591 | |a 355!Verl.-URL gelöscht(30-10-13)355!URL-Ä(15-12-16)355!URL-Ä(19-06-23) | ||
| 655 | 7 | |a Zeitschrift |0 (DE-588)4067488-5 |0 (DE-627)10454466X |0 (DE-576)20917000X |2 gnd-content | |
| 689 | 0 | 0 | |d s |0 (DE-588)4152545-0 |0 (DE-627)105537527 |0 (DE-576)209796375 |a Epitaxie |2 gnd |
| 689 | 0 | 1 | |d s |0 (DE-588)4067488-5 |0 (DE-627)10454466X |0 (DE-576)20917000X |a Zeitschrift |2 gnd |
| 689 | 0 | 2 | |d s |0 (DE-588)4511937-5 |0 (DE-627)248012134 |0 (DE-576)213199033 |a Online-Ressource |2 gnd |
| 689 | 0 | |5 DE-101 | |
| 689 | 1 | 0 | |d s |0 (DE-588)4134881-3 |0 (DE-627)10566927X |0 (DE-576)20965600X |a Oberflächenphysik |2 gnd |
| 689 | 1 | 1 | |d s |0 (DE-588)4067488-5 |0 (DE-627)10454466X |0 (DE-576)20917000X |a Zeitschrift |2 gnd |
| 689 | 1 | 2 | |d s |0 (DE-588)4511937-5 |0 (DE-627)248012134 |0 (DE-576)213199033 |a Online-Ressource |2 gnd |
| 689 | 1 | |5 DE-101 | |
| 689 | 2 | 0 | |d s |0 (DE-588)4187326-9 |0 (DE-627)105273015 |0 (DE-576)210045051 |a Vakuumphysik |2 gnd |
| 689 | 2 | 1 | |d s |0 (DE-588)4067488-5 |0 (DE-627)10454466X |0 (DE-576)20917000X |a Zeitschrift |2 gnd |
| 689 | 2 | 2 | |d s |0 (DE-588)4511937-5 |0 (DE-627)248012134 |0 (DE-576)213199033 |a Online-Ressource |2 gnd |
| 689 | 2 | |5 DE-101 | |
| 689 | 3 | 0 | |d s |0 (DE-588)4062270-8 |0 (DE-627)106132806 |0 (DE-576)209143274 |a Vakuumtechnik |2 gnd |
| 689 | 3 | 1 | |d s |0 (DE-588)4067488-5 |0 (DE-627)10454466X |0 (DE-576)20917000X |a Zeitschrift |2 gnd |
| 689 | 3 | 2 | |d s |0 (DE-588)4511937-5 |0 (DE-627)248012134 |0 (DE-576)213199033 |a Online-Ressource |2 gnd |
| 689 | 3 | |5 DE-101 | |
| 710 | 2 | |a American Vacuum Society |e Herausgebendes Organ |0 (DE-588)867-9 |0 (DE-627)100008216 |0 (DE-576)190133791 |4 isb | |
| 776 | 1 | |x 0734-2101 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |t Journal of vacuum science and technology. A, Vacuum, surfaces, & films |d New York, NY : Inst., 1983 |w (DE-627)130628336 |w (DE-600)797704-9 |w (DE-576)01613432X |x 0734-2101 |
| 776 | 0 | 8 | |i Erscheint auch als |n CD-ROM-Ausgabe |t Journal of vacuum science & technology / A & B |d New York, NY : Inst., 2011 |h CD-ROMs |w (DE-627)721995748 |w (DE-600)2676899-9 |w (DE-576)369994949 |
| 856 | 4 | 0 | |u https://ezb.ur.de/?1475424-1 |x Frontdoor-Url |
| 856 | 4 | 0 | |u https://pubs.aip.org/avs/jva |x Verlag |
| 912 | |a ZDB-1-AIPO | ||
| 936 | r | v | |a UA 1000 |b Referateblätter und Zeitschriften |k Physik |k Referateblätter und Zeitschriften |0 (DE-627)1399175343 |0 (DE-625)rvk/145215: |0 (DE-576)329175343 |
| 936 | b | k | |a 33.09 |j Physik unter besonderen Bedingungen |0 (DE-627)181571110 |
| 936 | b | k | |a 52.78 |j Oberflächentechnik |j Wärmebehandlung |0 (DE-627)106421395 |
| 951 | |a JT | ||
| 990 | |a Online-Ressource | ||
| 990 | |a Zeitschrift | ||
| 990 | |a Vakuumtechnik | ||
| 990 | |a Online-Ressource | ||
| 990 | |a Zeitschrift | ||
| 990 | |a Vakuumphysik | ||
| 990 | |a Online-Ressource | ||
| 990 | |a Zeitschrift | ||
| 990 | |a Oberflächenphysik | ||
| 990 | |a Online-Ressource | ||
| 990 | |a Zeitschrift | ||
| 990 | |a Epitaxie | ||
| SPR | |a Y | ||
| JSO | |a {"title":[{"title":"Journal of vacuum science & technology","subtitle":"JVST ; the official journal of the American Vacuum Society","title_sort":"Journal of vacuum science & technology","partname":"Vacuum, surfaces, and films"}],"pubHistory":["1.1983 -"],"titleAlt":[{"title":"Journal of vacuum science & technology / A"},{"title":"JVST"},{"title":"Journal of vacuum science and technology"}],"note":["Gesehen am 19.06.2023"],"type":{"media":"Online-Ressource","bibl":"periodical"},"corporate":[{"display":"American Vacuum Society","roleDisplay":"Herausgebendes Organ","role":"isb"}],"language":["eng"],"recId":"269538232","origin":[{"publisherPlace":"New York, NY","dateIssuedDisp":"1983-","publisher":"Inst.","dateIssuedKey":"1983"}],"id":{"issn":["1520-8559"],"eki":["269538232"],"zdb":["1475424-1"]},"name":{"displayForm":["publ. by the American Institute of Physics"]},"physDesc":[{"extent":"Online-Ressource"}]} | ||
| SRT | |a JOURNALOFV1983 | ||