Dauerhafte URL dieser Seite: https://heibib.ub.uni-heidelberg.de/person/1140740253
Kleditzsch, Stefan (Dipl.-Chem.)
Newest Titles
- Sensitivity studies for volume averaged models of plasma etch reactorsArticle (Journal), Online Resource
- Modelling inductively coupled plasmas: a sensitivity study on plasma chemistry and surface chemistryArticle (Journal), Online Resource
- Sensitivity studies of silicon etching in chlorine/argon plasmasArticle (Journal), Online Resource


