Journal of vacuum science and technology: JVST ; an AVS journal / B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
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| Previous Title: | Journal of vacuum science & technology |
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| Format: | Edited Volume Journal |
| Language: | English |
| Published: |
New York, NY
Inst.
1983-
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| Volumes / Articles: | Show Volumes / Articles. |
| ISSN: | 2166-2746 1071-1023 0734-211X 2327-9877 1520-8567 2166-2754 0022-5355 |
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| Author Notes: | publ. by the Society through the American Institute of Physics |
| Published: | 2.Ser. 1.1983 - |
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| Item Description: | 1. Zusatz ab 2.Ser. 12.1994 |
| ISSN: | 2166-2746 1071-1023 0734-211X 2327-9877 1520-8567 2166-2754 0022-5355 |