APA (7th ed.) Citation

(1983). Journal of vacuum science and technology: JVST ; an AVS journal. Inst.

Chicago Style (17th ed.) Citation

Journal of Vacuum Science and Technology: JVST ; an AVS Journal. New York, NY: Inst, 1983.

MLA (9th ed.) Citation

Journal of Vacuum Science and Technology: JVST ; an AVS Journal. Inst, 1983.

Warning: These citations may not always be 100% accurate.