Journal of vacuum science and technology: JVST ; an AVS journal / B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
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| Vorheriger Titel: | Journal of vacuum science & technology |
|---|---|
| Dokumenttyp: | Edited Volume Zeitschrift |
| Sprache: | Englisch |
| Veröffentlicht: |
New York, NY
Inst.
1983-
|
| Volumes / Articles: | Show Volumes / Articles. |
| ISSN: | 2166-2746 1071-1023 0734-211X 2327-9877 1520-8567 2166-2754 0022-5355 |
| Schlagworte: | |
| Online-Zugang: |
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| Verfasserangaben: | publ. by the Society through the American Institute of Physics |
MARC
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| 245 | 0 | 0 | |a Journal of vacuum science and technology |b JVST ; an AVS journal |n B |p Nanotechnology & microelectronics : materials, processing, measurement, & phenomena |c publ. by the Society through the American Institute of Physics |
| 246 | 1 | |i Abweichender Titel |a Journal of vacuum science and technology / B | |
| 246 | 3 | 3 | |a JVST |
| 247 | 1 | 0 | |a Journal of vacuum science & technology |f Hauptsacht. bis 28.2010,1 |
| 247 | 1 | 0 | |a the official journal of the AVS |f 2. Zusatz anfangs |
| 247 | 1 | 0 | |a Microelectronics processing and phenomena |f Sachl. Benennung bis 8.1990 |
| 247 | 1 | 0 | |a Microelectronics and nanometer structures |f Sachl. Benennung 9.1991 - 20.2002 |
| 247 | 1 | 0 | |a An international journal devoted to microelectronics and nanometer structures |f Sachl. Benennung 21.2003 - 28.2010,1 |
| 264 | 3 | 1 | |a New York, NY |b Inst. |c 1983- |
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| 362 | 0 | |a 2.Ser. 1.1983 - | |
| 363 | 0 | 1 | |a 1 |i 1983 |
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| 365 | |b 1983-1990 | ||
| 500 | |a 1. Zusatz ab 2.Ser. 12.1994 | ||
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