Characterization of ultrathin films on silicon by scanning force microscopy, FTIR-spectroscopy and ellipsometry
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| Main Author: | |
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| Format: | Book/Monograph Thesis |
| Language: | English |
| Published: |
2007
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| Author Notes: | vorgelegt von Pavel Prunici |
| Item Description: | Zsfassung in dt. Sprache |
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