APA (7th ed.) Citation

Müther, T., & Oberthaler, M. K. (2001). Three dimensional nanolithography with light forces. Microelectronic engineering, 57-58, . https://doi.org//10.1016/S0167-9317(01)00442-7

Chicago Style (17th ed.) Citation

Müther, Tobias, and Markus K. Oberthaler. "Three Dimensional Nanolithography with Light Forces." Microelectronic Engineering 57-58 (2001). https://doi.org//10.1016/S0167-9317(01)00442-7.

MLA (9th ed.) Citation

Müther, Tobias, and Markus K. Oberthaler. "Three Dimensional Nanolithography with Light Forces." Microelectronic Engineering, vol. 57-58, 2001, https://doi.org//10.1016/S0167-9317(01)00442-7.