Moisture barrier properties of plasma enhanced chemical vapor deposited SiCxNy films on polyethylene naphthalate sheets and epoxy molding compound
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| Main Authors: | , |
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| Format: | Article (Journal) |
| Language: | English |
| Published: |
4 September 2002
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| In: |
Surface and coatings technology
Year: 2002, Volume: 161, Issue: 1, Pages: 96-101 |
| ISSN: | 1879-3347 |
| DOI: | 10.1016/S0257-8972(02)00419-X |
| Online Access: | Verlag, kostenfrei registrierungspflichtig, Volltext: https://doi.org/10.1016/S0257-8972(02)00419-X
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| Author Notes: | Gisela Kaltenpoth, Walter Siebert, Frank Stubhan, Xuhong Wang, Le Luo |
| Item Description: | Die Buchstaben "x" und "y" sind im Titel tiefgestellt Gesehen am 23.03.2018 |
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| Physical Description: | Online Resource |
| ISSN: | 1879-3347 |
| DOI: | 10.1016/S0257-8972(02)00419-X |