Moisture barrier properties of plasma enhanced chemical vapor deposited SiCxNy films on polyethylene naphthalate sheets and epoxy molding compound
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Dokumenttyp: | Article (Journal) |
| Sprache: | Englisch |
| Veröffentlicht: |
4 September 2002
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| In: |
Surface and coatings technology
Year: 2002, Jahrgang: 161, Heft: 1, Pages: 96-101 |
| ISSN: | 1879-3347 |
| DOI: | 10.1016/S0257-8972(02)00419-X |
| Online-Zugang: | Verlag, kostenfrei registrierungspflichtig, Volltext: https://doi.org/10.1016/S0257-8972(02)00419-X
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| Verfasserangaben: | Gisela Kaltenpoth, Walter Siebert, Frank Stubhan, Xuhong Wang, Le Luo |
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