High-precision combinatorial deposition of micro particle patterns on a microelectronic chip

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Bibliographic Details
Other Authors:	Löffler, Felix (Other) , Wagner, Jennifer (Other) , Hausmann, Michael (Other)
Format:	Article (Journal)
Language:	English
Published:	2011
In:	Aerosol science and technology Year: 2011, Volume: 45, Pages: 65-74
ISSN:	0278-6826
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Author Notes:	Löffler, F., Wagner, J. ... Hausmann, M. ...

High-Precision combinatorial deposition of micro particle patterns on a microelectronic chip by Löffler, Felix (Author) , Wagner, Jennifer (Author) , König, Kai (Author) , Märkle, Frieder (Author) , Fernández, Simón (Author) , Schirwitz, Christopher (Author) , Torralba, Gloria (Author) , Hausmann, Michael (Author) , Lindenstruth, V. (Author) , Bischoff, F. Ralf (Author) , Breitling, F. (Author) , Nesterov, A. (Author) ,

in: Aerosol science and technology, 45 (2011), 1, Seite 65-74

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