Journal of vacuum science & technology: JVST ; an AVS journal / B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena
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| Vorheriger Titel: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures |
|---|---|
| Dokumenttyp: | Sammelband Zeitschrift |
| Sprache: | Englisch |
| Veröffentlicht: |
New York, NY
AIP Publishing
2010-
|
| Volumes / Articles: | Show Volumes / Articles. |
| ISSN: | 2166-2754 2166-2746 1520-8567 |
| Schlagworte: | |
| Online-Zugang: | Frontdoor-Url: https://ezb.ur.de/?3117331-7 Verlag: https://pubs.aip.org/avs/jvb 
|
| Verfasserangaben: | publ. by the Society through the American Institute of Physics |
MARC
| LEADER | 00000cas a2200000 c 4500 | ||
|---|---|---|---|
| 001 | 1800461763 | ||
| 003 | DE-627 | ||
| 005 | 20250827172909.0 | ||
| 007 | cr ||||||||||| | ||
| 008 | 220427c20109999xxuz| p|o 0 |0eng c | ||
| 016 | 7 | |a 1256321184 |2 DE-101 | |
| 016 | 7 | |a 3117331-7 |2 DE-600 | |
| 022 | |a 2166-2754 |l 2166-2746 | ||
| 035 | |a (DE-627)1800461763 | ||
| 035 | |a (DE-599)ZDB3117331-7 | ||
| 035 | |a (OCoLC)1368589312 | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rda | ||
| 041 | |a eng | ||
| 044 | |c XD-US | ||
| 082 | 0 | 4 | |a 530 |q DE-600 |
| 084 | |a 29 |2 sdnb | ||
| 084 | |a UA 1000 |2 rvk |0 (DE-625)rvk/145215: | ||
| 084 | |a 53.55 |2 bkl | ||
| 084 | |a 50.94 |2 bkl | ||
| 084 | |a 53.56 |2 bkl | ||
| 084 | |a 51.30 |2 bkl | ||
| 245 | 0 | 0 | |a Journal of vacuum science & technology |b JVST ; an AVS journal |n B |p Nanotechnology & microelectronics : materials, processing, measurement, & phenomena |c publ. by the Society through the American Institute of Physics |
| 246 | 1 | |i Abweichender Titel |a Nanotechnology and microelectronics | |
| 246 | 1 | |i Abweichender Titel |a JVST B | |
| 246 | 3 | 3 | |a Journal of vacuum science and technology |
| 264 | 3 | 1 | |a New York, NY |b AIP Publishing |c 2010- |
| 300 | |a Online-Ressource | ||
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 362 | 0 | |a 2nd ser., Volume 28, Issue 1, (January 2010)- | |
| 363 | 0 | 1 | |a 28 |i 2010 |
| 655 | 7 | |a Zeitschrift |0 (DE-588)4067488-5 |0 (DE-627)10454466X |0 (DE-576)20917000X |2 gnd-content | |
| 689 | 0 | 0 | |d s |0 (DE-588)4062270-8 |0 (DE-627)106132806 |0 (DE-576)209143274 |a Vakuumtechnik |2 gnd |
| 689 | 0 | |5 DE-101 | |
| 710 | 2 | |a American Vacuum Society |e Herausgebendes Organ |0 (DE-588)867-9 |0 (DE-627)100008216 |0 (DE-576)190133791 |4 isb | |
| 776 | 1 | |x 2166-2746 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |t Journal of vacuum science and technology. B, Nanotechnology & microelectronics |d New York, NY : Inst., 1983 |w (DE-627)13062845X |w (DE-600)797726-8 |w (DE-576)016134419 |x 2166-2746 |
| 780 | 0 | 0 | |i Fortsetzung von |t Journal of vacuum science & technology. B, Microelectronics and nanometer structures |d New York : Published for the Society by the American Institute of Physics, 1991 |h Online-Ressource |w (DE-627)1800461771 |w (DE-600)3117333-0 |x 1520-8567 |
| 856 | 4 | 0 | |u https://ezb.ur.de/?3117331-7 |x Frontdoor-Url |7 1 |
| 856 | 4 | 0 | |u https://pubs.aip.org/avs/jvb |x Verlag |7 1 |
| 912 | |a ZDB-1-AIPO | ||
| 936 | r | v | |a UA 1000 |b Referateblätter und Zeitschriften |k Physik |k Referateblätter und Zeitschriften |0 (DE-627)1399175343 |0 (DE-625)rvk/145215: |0 (DE-576)329175343 |
| 936 | b | k | |a 53.55 |j Mikroelektronik |q SEPA |0 (DE-627)10641853X |
| 936 | b | k | |a 50.94 |j Mikrosystemtechnik |j Nanotechnologie |q SEPA |0 (DE-627)181570645 |
| 936 | b | k | |a 53.56 |j Halbleitertechnologie |q SEPA |0 (DE-627)106418688 |
| 936 | b | k | |a 51.30 |j Werkstoffprüfung |j Werkstoffuntersuchung |q SEPA |0 (DE-627)106414054 |
| 951 | |a JT | ||
| 990 | |a Vakuumtechnik | ||
| SPR | |a Y | ||
| JSO | |a {"pubHistory":["2nd ser., Volume 28, Issue 1, (January 2010)-"],"titleAlt":[{"title":"Nanotechnology and microelectronics"},{"title":"JVST B"},{"title":"Journal of vacuum science and technology"}],"id":{"eki":["1800461763"],"zdb":["3117331-7"],"issn":["2166-2754"]},"origin":[{"dateIssuedDisp":"2010-","dateIssuedKey":"2010","publisher":"AIP Publishing","publisherPlace":"New York, NY"}],"name":{"displayForm":["publ. by the Society through the American Institute of Physics"]},"recId":"1800461763","title":[{"title_sort":"Journal of vacuum science & technology","subtitle":"JVST ; an AVS journal","title":"Journal of vacuum science & technology","partname":"Nanotechnology & microelectronics : materials, processing, measurement, & phenomena"}],"physDesc":[{"extent":"Online-Ressource"}],"language":["eng"],"type":{"bibl":"periodical","media":"Online-Ressource"},"corporate":[{"display":"American Vacuum Society","role":"isb"}]} | ||
| SRT | |a JOURNALOFV2010 | ||