APA (7th ed.) Citation

Löffler, F., Wagner, J., König, K., Märkle, F., Fernández, S., Schirwitz, C., . . . Nesterov, A. (2011). High-Precision combinatorial deposition of micro particle patterns on a microelectronic chip. Aerosol science and technology, 45(1), . https://doi.org/10.1080/02786826.2010.517814

Chicago Style (17th ed.) Citation

Löffler, Felix, et al. "High-Precision Combinatorial Deposition of Micro Particle Patterns on a Microelectronic Chip." Aerosol Science and Technology 45, no. 1 (2011). https://doi.org/10.1080/02786826.2010.517814.

MLA (9th ed.) Citation

Löffler, Felix, et al. "High-Precision Combinatorial Deposition of Micro Particle Patterns on a Microelectronic Chip." Aerosol Science and Technology, vol. 45, no. 1, 2011, https://doi.org/10.1080/02786826.2010.517814.

Warning: These citations may not always be 100% accurate.