Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations
Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabricat...
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| Main Authors: | , , , , , , |
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| Format: | Article (Journal) |
| Language: | English |
| Published: |
29 Oct 2010
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| In: |
Optics express
Year: 2010, Volume: 18, Issue: 23, Pages: 23878-23890 |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/OE.18.023878 |
| Online Access: | Verlag, lizenzpflichtig, Volltext: https://doi.org/10.1364/OE.18.023878 Verlag, lizenzpflichtig, Volltext: https://opg.optica.org/oe/abstract.cfm?uri=oe-18-23-23878 
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| Author Notes: | Dennis Lehr, Michael Helgert, Michael Sundermann, Christoph Morhard, Claudia Pacholski, Joachim P. Spatz, and Robert Brunner |
| Summary: | Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of structures fabricated in fused silica. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures. |
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| Item Description: | Gesehen am 13.03.2023 |
| Physical Description: | Online Resource |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/OE.18.023878 |