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Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations

Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabricat...

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Bibliographische Detailangaben
Hauptverfasser: Lehr, Dennis (VerfasserIn) , Helgert, Michael (VerfasserIn) , Sundermann, Michael (VerfasserIn) , Morhard, Christoph (VerfasserIn) , Pacholski, Claudia (VerfasserIn) , Spatz, Joachim P. (VerfasserIn) , Brunner, Robert (VerfasserIn)
Dokumenttyp: Article (Journal)
Sprache:Englisch
Veröffentlicht: 29 Oct 2010
In: Optics express
Year: 2010, Jahrgang: 18, Heft: 23, Pages: 23878-23890
ISSN:1094-4087
DOI:10.1364/OE.18.023878
Online-Zugang:Verlag, lizenzpflichtig, Volltext: https://doi.org/10.1364/OE.18.023878
Verlag, lizenzpflichtig, Volltext: https://opg.optica.org/oe/abstract.cfm?uri=oe-18-23-23878
Volltext
Verfasserangaben:Dennis Lehr, Michael Helgert, Michael Sundermann, Christoph Morhard, Claudia Pacholski, Joachim P. Spatz, and Robert Brunner
Beschreibung
Zusammenfassung:Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of structures fabricated in fused silica. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures.
Beschreibung:Gesehen am 13.03.2023
Beschreibung:Online Resource
ISSN:1094-4087
DOI:10.1364/OE.18.023878

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