Anodization-free fabrication process for high-quality cross-type Josephson tunnel junctions based on a Nb/Al-AlOx/Nb trilayer
Josephson tunnel junctions form the basis for various superconductor electronic devices. For this reason, enormous efforts are routinely taken to establish and later on maintain a scalable and reproducible wafer-scale manufacturing process for high-quality Josephson junctions. Here, we present an an...
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| Hauptverfasser: | , , |
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| Dokumenttyp: | Article (Journal) |
| Sprache: | Englisch |
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8 July 2024
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| In: |
Superconductor science and technology
Year: 2024, Jahrgang: 37, Heft: 8, Pages: 1-12 |
| ISSN: | 1361-6668 |
| DOI: | 10.1088/1361-6668/ad59cf |
| Online-Zugang: | Verlag, kostenfrei, Volltext: https://doi.org/10.1088/1361-6668/ad59cf Verlag, kostenfrei, Volltext: https://dx.doi.org/10.1088/1361-6668/ad59cf 
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| Verfasserangaben: | F Adam, C Enss and S Kempf |
MARC
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| 520 | |a Josephson tunnel junctions form the basis for various superconductor electronic devices. For this reason, enormous efforts are routinely taken to establish and later on maintain a scalable and reproducible wafer-scale manufacturing process for high-quality Josephson junctions. Here, we present an anodization-free fabrication process for Nb/Al-AlO x /Nb cross-type Josephson junctions that requires only a small number of process steps and that is in general intrinsically compatible with wafer-scale fabrication. We show that the fabricated junctions are of very high quality and, compared to other junction types, exhibit not only a significantly reduced capacitance but also an almost rectangular critical current density profile. Our process hence enables the usage of low capacitance Josephson junctions for superconductor electronic devices such as ultra-low noise dc-superconducting quantum interference devices (SQUIDs), microwave SQUID multiplexers based on non-hysteretic rf-SQUIDs and RFSQ circuits. | ||
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