Journal of vacuum science & technology: JVST ; the official journal of the American Vacuum Society / A Vacuum, surfaces, and films
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| Format: | Edited Volume Journal |
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| Language: | English |
| Published: |
New York, NY
Inst.
1983-
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| Volumes / Articles: | Show Volumes / Articles. |
| ISSN: | 1520-8559 0734-2101 |
| Subjects: | |
| Online Access: | Frontdoor-Url: https://ezb.ur.de/?1475424-1 Verlag: https://pubs.aip.org/avs/jva 
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| Author Notes: | publ. by the American Institute of Physics |
| Published: | 1.1983 - |
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| Item Description: | Gesehen am 19.06.2023 |
| Physical Description: | Online Resource |
| ISSN: | 1520-8559 0734-2101 |