Microelectronic engineering
Saved in:
| Format: | Edited Volume Journal |
|---|---|
| Language: | English |
| Published: |
[Erscheinungsort nicht ermittelbar]
Elsevier
1983-
|
| Volumes / Articles: | Show Volumes / Articles. |
| ISSN: | 0167-9317 |
| Subjects: | |
| Online Access: | Frontdoor-Url: https://ezb.ur.de/?1497065-X Verlag: https://www.sciencedirect.com/journal/microelectronic-engineering Verlag; 1.1983 - 2002, Deutschlandweit zugänglich: https://www.sciencedirect.com/journal/microelectronic-engineering 
|
| Published: | 1.1983 - 88.2011; Vol. 89.2012 - |
|---|---|
| Physical Description: | Online Resource |
| ISSN: | 0167-9317 |