Three dimensional nanolithography with light forces
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Dokumenttyp: | Article (Journal) |
| Sprache: | Englisch |
| Veröffentlicht: |
2001
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| In: |
Microelectronic engineering
Year: 2001, Jahrgang: 57-58, Pages: 857-863 |
| DOI: | /10.1016/S0167-9317(01)00442-7 |
| Online-Zugang: | Resolving-System, Volltext: http://dx.doi.org//10.1016/S0167-9317(01)00442-7
|
| Verfasserangaben: | T. Müther, Th. Schulze, D. Jürgens, M. K. Oberthaler, and J. Mlynek |
MARC
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