Cover Image

Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources

Saved in:
Bibliographic Details
Main Authors: Franke, Sebastian (Author) , Beck, Sebastian (Author) , Pucci, Annemarie (Author)
Format: Article (Journal)
Language:English
Published: 2017
In: Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Year: 2016, Volume: 35
ISSN:1520-8559
DOI:10.1116/1.4971173
Online Access:Verlag, Volltext: http://dx.doi.org/10.1116/1.4971173
Verlag, Volltext: https://avs.scitation.org/doi/10.1116/1.4971173
Get full text
Author Notes:Sebastian Franke, Matthias Baumkötter, Carsten Monka, Sebastian Raabe, Reinhard Caspary, Hans-Hermann Johannes, Wolfgang Kowalsky, Sebastian Beck, Annemarie Pucci, Hassan Gargouri
Description
Item Description:Published onine December 2016
Gesehen am 24.04.2018
Physical Description:Online Resource
ISSN:1520-8559
DOI:10.1116/1.4971173

Similar Items