High-Precision combinatorial deposition of micro particle patterns on a microelectronic chip

The behavior of charged bio polymer micro particles when deposited onto a CMOS chip can be analytically modeled in form of the incompressible Navier-Stokes equation and the electrostatic Poisson equation, as we describe in this article. Based on these models, numerical simulations of depositions can...

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Bibliographic Details

Main Authors:	Löffler, Felix (Author) , Wagner, Jennifer (Author) , König, Kai (Author) , Märkle, Frieder (Author) , Fernández, Simón (Author) , Schirwitz, Christopher (Author) , Torralba, Gloria (Author) , Hausmann, Michael (Author) , Lindenstruth, V. (Author) , Bischoff, F. Ralf (Author) , Breitling, F. (Author) , Nesterov, A. (Author)
Format:	Article (Journal)
Language:	English
Published:	2011
In:	Aerosol science and technology Year: 2011, Volume: 45, Issue: 1, Pages: 65-74
ISSN:	1521-7388
DOI:	10.1080/02786826.2010.517814
Online Access:	Verlag, lizenzpflichtig, Volltext: https://doi.org/10.1080/02786826.2010.517814 Verlag, lizenzpflichtig, Volltext: https://www.tandfonline.com/doi/full/10.1080/02786826.2010.517814
Author Notes:	F. Löffler, J. Wagner, K. König, F. Märkle, S. Fernandez, C. Schirwitz, G. Torralba, M. Hausmann, V. Lindenstruth, F.R. Bischoff, F. Breitling, and A. Nesterov