Cover Image

Numerical study of apparent activation energies of diamond growth rates in hot filament chemical vapor deposition systems

Saved in:
Bibliographic Details
Main Authors: Behrendt, Frank (Author) , Deutschmann, Olaf (Author) , Ruf, Bernhard (Author) , Warnatz, Jürgen (Author)
Format: Article (Journal)
Language:English
Published: 1996
In: Journal of vacuum science & technology. A, Vacuum, surfaces, and films
Year: 1996, Volume: 14, Issue: 3, Pages: 1604-1608
ISSN:1520-8559
DOI:10.1116/1.580304
Online Access:Verlag, lizenzpflichtig, Volltext: https://doi.org/10.1116/1.580304
Verlag, lizenzpflichtig, Volltext: https://avs.scitation.org/doi/10.1116/1.580304
Get full text
Author Notes:Frank Behrendt, Olaf Deutschmann, Bernhard Ruf, Jürgen Warnatz
Description
Item Description:Elektronische Reproduktion der Druck-Ausgabe 4. Juni 1998
Gesehen am 19.04.2023
Physical Description:Online Resource
ISSN:1520-8559
DOI:10.1116/1.580304

Similar Items